Showing 1 - 20 results of 98 for search 'Swenberg, J. A.' Narrow Search
7
8
Academic Journal

Superior Title: Journal of Applied Physics, 73(9), 4660-4668, (1993-05-01)

Relation: https://doi.org/10.1063/1.352761; oai:authors.library.caltech.edu:xdgzh-n7q58; eprintid:29617; resolverid:CaltechAUTHORS:20120307-105358808

19
Conference

Subject Terms: T Technology (General)

Relation: Joshi, K.; Hung, S.; Mukhopadhyay, S.; Chaudhary, V.; Nanaware, N.; Rajamohnan, B.; Sato, T.; Bevan, M.; Wei, A.; Noori, A.; McDougal, B.; Ni, C.; Saheli, G.; Lazik, C.; Liu, P.; Chu, D.; Date, L.; Datta, S.; Brand, A.; Swenberg, J.; Mahapatra, S. (2013) HKMG process impact on N, P BTI: Role of thermal IL scaling, IL/HK integration and post HK nitridation In: 2013 IEEE International Conference on Reliability Physics Symposium (IRPS), 14-18 April, 2013, Anaheim, CA, USA.