Academic Journal
MEMS MANUFACTURING AND RELIABILITY
| Title: | MEMS MANUFACTURING AND RELIABILITY |
|---|---|
| Authors: | Titu-Marius I. Băjenescu |
| Superior Title: | Journal of Engineering Science (Chişinău), Vol XXVI, Iss 1, Pp 65-82 (2019) |
| Publisher Information: | Technical University of Moldova, 2019. |
| Publication Year: | 2019 |
| Collection: | LCC:Engineering (General). Civil engineering (General) LCC:Electronic computers. Computer science |
| Subject Terms: | Process errors, MEMS, optical MEMS, failure analysis, MEMS switches, package cracking, failure mechanisms, reliability, creep, lifetime prediction, Engineering (General). Civil engineering (General), TA1-2040, Electronic computers. Computer science, QA75.5-76.95 |
| Description: | Today flexibility means to produce reasonably priced customized products of high quality that can be quickly delivered to customers. The article analyses issues related to physic, able to generating defects, affecting the reliability limits for MEMS (Micro-Electro-Mechanical Systems). The MEMS industry is currently at a much more vulnerable position than it appears, regardless of how wonderful its future may look like. A full understanding of the physics and statistics of the defect generation is required to investigate the ultimate reliability limitations for nanodevices. Biggest challenge: cost effective, high volume production. |
| Document Type: | article |
| File Description: | electronic resource |
| Language: | English |
| ISSN: | 2587-3474 2587-3482 |
| Relation: | https://jes.utm.md/wp-content/uploads/sites/20/2019/05/JES-2019-1_65-82.pdf; https://doaj.org/toc/2587-3474; https://doaj.org/toc/2587-3482 |
| DOI: | 10.5281/zenodo.2640042 |
| Access URL: | https://doaj.org/article/57ae6f26ad9d4aa2b9db8170b9be7634 |
| Accession Number: | edsdoj.57ae6f26ad9d4aa2b9db8170b9be7634 |
| Database: | Directory of Open Access Journals |
| Description not available. |