Authors: Amirzada, Muhammad Rizwan, Li, Qingdang, Hillmer, Hartmut
Subject Terms: optical MEMS, micromirros, flexible substrate, polyethylene naphthalate, ddc:530, swd:MEMS, swd:Mikrooptik, swd:Spiegelsystem, swd:Substrat, swd:Thermoplast
Relation: http://doi.org/doi:10.17170/kobra-202104273752
Availability: https://doi.org/10.17170/kobra-202104273752https://doi.org/10.1007/s11082-021-02846-7