Authors: Yang, Xiaohui, Kästner, Philipp, Käkel, Eireen, Smolarczyk, Marek, Liu, Shujie, Li, Qingdang, Hillmer, Hartmut

Subject Terms: MEMS cantilever, pull-in voltage, actuation speed, non-linearity, dynamics, metallic material systems, ddc:620, ddc:660, swd:MEMS, swd:Elektrische Spannung, swd:Geschwindigkeit, swd:Nichtlineares Phänomen, swd:Dynamik, swd:Metallischer Werkstoff

Relation: Deutsche Forschungsgemeinschaft (DFG):(grant number: Nos Hi 763/21-1 and Hi 763/19-1); Deutsche Bundesstiftung Umwelt (DBU):(grant number: Nos. AZ23717, AZ20012/189, and AZ35501); and Bundesministerium für Bildung und Forschung (BMBF):(grant number: Nos. 13N14517 and 13N15740); http://doi.org/doi:10.17170/kobra-202302147492

Availability: https://doi.org/10.17170/kobra-202302147492
https://doi.org/10.3390/app13021118

Authors: Khan, Muhammad Mohsin

Contributors: Kassel, Universität Kassel, Fachbereich Elektrotechnik / Informatiik, Hillmer, Hartmut (Prof. Dr.), Börcsök, Josef (Prof. Dr.)

Subject Terms: MEMS based smart windows, micromirror arrays, C-V measurements, Amplitude Modulation Response (AMR), relaibility, lifetime testing, MEMS-basierte intelligente Fenster, Mikrospiegel-Arrays, C-V-Messungen, Zuverlässigkeit, Lebensdauertests, ddc:530, swd:MEMS, swd:Mikrosystemtechnik, swd:Array, swd:Amplitudenmodulation, swd:Glass, swd:Zuverlässigkeit, swd:Lebensdauer, swd:Energiebewusstes Bauen

Relation: http://doi.org/doi:10.17170/kobra-202403229850

Availability: https://doi.org/10.17170/kobra-202403229850

Authors: Amirzada, Muhammad Rizwan, Li, Qingdang, Hillmer, Hartmut

Subject Terms: optical MEMS, micromirros, flexible substrate, polyethylene naphthalate, ddc:530, swd:MEMS, swd:Mikrooptik, swd:Spiegelsystem, swd:Substrat, swd:Thermoplast

Relation: http://doi.org/doi:10.17170/kobra-202104273752

Availability: https://doi.org/10.17170/kobra-202104273752
https://doi.org/10.1007/s11082-021-02846-7

Authors: Worapattrakul, Natalie

Contributors: Kassel, Universität Kassel, Fachbereich Elektrotechnik / Informatik, Hillmer, Hartmut (Prof. Dr.), Lehmann, Peter (Prof. Dr.), Bangert, Axel (Prof. Dr.), Witzigmann, Bernd (Prof. Dr.)

Subject Terms: ddc:620, ddc:690, swd:MEMS, swd:Mikrooptik, swd:Spiegel, swd:Mikrofertigung, swd:Nanoprägen, swd:Planartechnik, swd:Tageslichtsystem, swd:Spiegelsystem, swd:Mikroaktor

Relation: http://doi.org/doi:10.19211/KUP9783737602792; http://nbn-resolving.org/urn:nbn:de:0002-402794; urn:nbn:de:0002-402794; urn:isbn:978-3-7376-0279-2 (e-book)

Availability: https://doi.org/10.19211/KUP9783737602792
http://nbn-resolving.org/urn:nbn:de:0002-402794
https://nbn-resolving.org/urn:nbn:de:0002-402794

Authors: Tatzel, Andreas

Contributors: Kassel, Universität Kassel, Fachbereich Elektrotechnik / Informatik, Hillmer, Hartmut (Prof. Dr.), Ziegler, Marcus (Prof. Dr.)

Subject Terms: Mikrospiegel, Mikrospiegel-Arrays, elektrostatische Aktuation, aktive Fenster, Eigenspannungen in Dünnschichten, Krümmungsentwurf, Krümmungsberechnung, Design von mechanischen Spannungen, Dünnschichtstapel, Intelligentes Glas, Tageslichtlenkung, ddc:620, swd:Spiegelsystem, swd:Tageslichtsystem, swd:Mikrosystemtechnik, swd:MEMS, swd:Array, swd:Krümmung

Relation: 314578, 284533; http://doi.org/doi:10.17170/kobra-20190121105

Availability: https://doi.org/10.17170/kobra-20190121105

Authors: Chatim, Ruddy Herard

Contributors: Kassel, Universität Kassel, Fachbereich Elektrotechnik / Informatik, Bangert, Axel (Prof. Dr.), Hillmer, Hartmut (Prof. Dr.)

Subject Terms: RF MEMS, tunable capacitor, VCO, microwave oscillator, ddc:620, swd:MEMS, swd:Drehkondensator, swd:Mikrowellenschaltung, swd:Mikrowellenoszillator, swd:VCO

Relation: http://nbn-resolving.org/urn:nbn:de:hebis:34-2018052855567; urn:nbn:de:hebis:34-2018052855567

Availability: http://nbn-resolving.org/urn:nbn:de:hebis:34-2018052855567
https://nbn-resolving.org/urn:nbn:de:hebis:34-2018052855567

Authors: Amirzada, Muhammad Rizwan

Contributors: Kassel, Universität Kassel, Fachbereich Elektrotechnik / Informatik, Hillmer, Hartmut, Bangert, Axel

Subject Terms: Surface Roughness, Stylus Profilometry, Atomic Force Microscopy, ddc:620, swd:MEMS, swd:Rauigkeit, swd:Rasterkraftmikroskopie

Relation: http://nbn-resolving.org/urn:nbn:de:hebis:34-2015022347468; urn:nbn:de:hebis:34-2015022347468

Availability: http://nbn-resolving.org/urn:nbn:de:hebis:34-2015022347468
https://nbn-resolving.org/urn:nbn:de:hebis:34-2015022347468

Authors: Woit, Tatjana

Contributors: Kassel, Universität, FB 16, Elektrotechnik/Informatik, Hillmer, Hartmut (Prof. Dr. rer. nat.), Witzigmann, Bernd (Prof. Dr. sc. techn.), Ehresmann, Arno (Prof. Dr. rer. nat.), Axel, Bangert (Prof. Dr.-Ing.)

Subject Terms: Fabry-Pérot-Resonator, Optisches Filter, Multischichtsystem, Dünnschichttechnologie, MEMS, Spektrometer, ddc:620, swd:Fabry-Pérot-Resonator, swd:Optisches Filter, swd:Mehrschichtsystem, swd:Dünnschichttechnik, swd:MEMS, swd:Spektrometer

Relation: http://nbn-resolving.org/urn:nbn:de:hebis:34-2013121344669; urn:nbn:de:hebis:34-2013121344669

Availability: http://nbn-resolving.org/urn:nbn:de:hebis:34-2013121344669
https://nbn-resolving.org/urn:nbn:de:hebis:34-2013121344669

Authors: Setyawati, Onny

Contributors: Kassel, Univ., Fachbereich Elektrotechnik/Informatik, Hillmer, Hartmut (Prof. Dr.), Börcsök, Josef (Prof. Dr.-Ing.)

Subject Terms: spectrometer, tunable optical filter, Fabry-Pérot filter, MEMS technology, Dry etching, ddc:620, swd:Spektrometer, swd:MEMS

Relation: http://nbn-resolving.org/urn:nbn:de:hebis:34-2012042341117; urn:nbn:de:hebis:34-2012042341117

Availability: http://nbn-resolving.org/urn:nbn:de:hebis:34-2012042341117
https://nbn-resolving.org/urn:nbn:de:hebis:34-2012042341117

Authors: Hasse, Andreas

Contributors: Kassel, Universität, FB 18, Naturwissenschaften, Institut für Physik, Hillmer, Hartmut (Prof. Dr.), Reithmaier, Johann Peter (Prof. Dr.)

Subject Terms: MOVPE, MEMS, MOEMS, Filter, Resonatorstruktur, ddc:530, pacs:61.82.Fk, swd:MOCVD-Verfahren, swd:Galliumarsenid-Bauelement, swd:MEMS, swd:Mikrooptik, swd:Quantenwell

File Description: 1991455 bytes; application/pdf

Relation: http://nbn-resolving.org/urn:nbn:de:hebis:34-2006102715293; urn:nbn:de:hebis:34-2006102715293

Availability: http://nbn-resolving.org/urn:nbn:de:hebis:34-2006102715293
https://nbn-resolving.org/urn:nbn:de:hebis:34-2006102715293

Authors: Ataro, Edwin Omondi

Contributors: Kassel, Universität, FB 16, Elektrotechnik/Informatik, Hillmer, Hartmut (Prof. Dr.), Becker, Wolf-Jürgen (Prof. Dr.)

Subject Terms: Mikroelektronik, Optoelectronic devices, Design and modeling micro-electromechanical devices, Electrostatic tuning, Optical micro-cavity filters, Scaling, ddc:620, pacs:42.79.Ci, pacs:02.70.Dh, pacs:85.60.Bt, pacs:46.70.De, pacs:85.85.+j, swd:DWDM, swd:Optisches Filter, swd:Verteilte Bragg-Reflexion, swd:Vertikalresonator, swd:MEMS, swd:Finite-Elemente-Methode, swd:VCSEL-Laser

File Description: 3637999 bytes; application/pdf

Relation: http://nbn-resolving.org/urn:nbn:de:hebis:34-2150; urn:nbn:de:hebis:34-2150

Availability: http://nbn-resolving.org/urn:nbn:de:hebis:34-2150
https://nbn-resolving.org/urn:nbn:de:hebis:34-2150

Authors: Soßna, Eva

Contributors: Kassel, Universität, FB 18, Naturwissenschaften, Institut für Physik, Kassing, Rainer (Prof. Dr.)

Subject Terms: Silizium-Membrane, Ätzstopp, pn-Übergang, ddc:530, swd:Silicium, swd:MEMS, swd:pn-Übergang

File Description: 1216096 bytes; application/pdf

Relation: http://nbn-resolving.org/urn:nbn:de:hebis:34-1592; urn:nbn:de:hebis:34-1592

Availability: http://nbn-resolving.org/urn:nbn:de:hebis:34-1592
https://nbn-resolving.org/urn:nbn:de:hebis:34-1592