Authors: Koh, K.H., Kobayashi, T., Liu, H., Lee, C.
Contributors: ELECTRICAL & COMPUTER ENGINEERING
Superior Title: Scopus
Subject Terms: Micro-electro-mechanical systems (MEMS), Optical MEMS, Piezoelectric actuator, PZT
Relation: Koh, K.H., Kobayashi, T., Liu, H., Lee, C. (2011). Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator. Procedia Engineering 25 : 701-704. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proeng.2011.12.173; http://scholarbank.nus.edu.sg/handle/10635/83861; 000300512400170
Availability:
https://doi.org/10.1016/j.proeng.2011.12.173
http://scholarbank.nus.edu.sg/handle/10635/83861
Authors: Koh, K.H., Lee, C., Kobayashi, T.
Contributors: ELECTRICAL & COMPUTER ENGINEERING
Superior Title: Scopus
Subject Terms: Microelectromechanical Systems (MEMS), Optical MEMS, Piezoelectric actuator, Variable optical attenuator (VOA)
Relation: Koh, K.H., Lee, C., Kobayashi, T. (2010). A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators. Procedia Engineering 5 : 613-616. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proeng.2010.09.184; http://scholarbank.nus.edu.sg/handle/10635/68708; 000287162400152
Availability:
https://doi.org/10.1016/j.proeng.2010.09.184
http://scholarbank.nus.edu.sg/handle/10635/68708
Authors: Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C.
Contributors: ELECTRICAL & COMPUTER ENGINEERING
Superior Title: Scopus
Subject Terms: Micro-electro-mechanical systems (MEMS), Micromirror, Optical MEMS, Piezoelectric actuator, PZT
Relation: Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C. (2010-08). Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors. Sensors and Actuators, A: Physical 162 (2) : 336-347. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2010.04.021; http://scholarbank.nus.edu.sg/handle/10635/83543; 000282923900031
Availability:
https://doi.org/10.1016/j.sna.2010.04.021
http://scholarbank.nus.edu.sg/handle/10635/83543
Authors: Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C.
Contributors: ELECTRICAL & COMPUTER ENGINEERING
Superior Title: Scopus
Subject Terms: Microelectromechanical Systems (MEMS), Optical MEMS, Piezoelectric actuator, PZT, Scanning mirror
Relation: Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C. (2009-09). A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators. Procedia Chemistry 1 (1) : 1303-1306. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proche.2009.07.325; http://scholarbank.nus.edu.sg/handle/10635/83319; 000275995600108
Availability:
https://doi.org/10.1016/j.proche.2009.07.325
http://scholarbank.nus.edu.sg/handle/10635/83319
Authors: Lee, C., Hsiao, F.-L., Kobayashi, T., Koh, K.H., Ramana, P.V., Xiang, W., Yang, B., Tan, C.W., Pinjala, D.
Contributors: ELECTRICAL & COMPUTER ENGINEERING
Superior Title: Scopus
Subject Terms: Microelectromechanical systems (MEMS), Mirror, Optical MEMS, Piezoelectric actuator, PZT, Variable optical attenuators (VOAs)
Relation: Lee, C., Hsiao, F.-L., Kobayashi, T., Koh, K.H., Ramana, P.V., Xiang, W., Yang, B., Tan, C.W., Pinjala, D. (2009-09). A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators. IEEE Journal on Selected Topics in Quantum Electronics 15 (5) : 1529-1536. ScholarBank@NUS Repository. https://doi.org/10.1109/JSTQE.2009.2022959; http://scholarbank.nus.edu.sg/handle/10635/68706; 000270950300034
Availability:
https://doi.org/10.1109/JSTQE.2009.2022959
http://scholarbank.nus.edu.sg/handle/10635/68706
Authors: Zimmer, F., Niklaus, F., Lapisa, M., Ludewig, T., Bring, M., Friedrichs, M., Bakke, T., Schenk, H., Wijngaart, W. van der
Subject Terms: optical MEMS, micro mirror, spatial light modulator
Time: 621
Relation: Conference "MOEMS and Miniaturized Systems" 2009; MOEMS and miniaturized systems VIII; https://publica.fraunhofer.de/handle/publica/361996
Authors: Dauderstädt, U., Askebjer, P., Björnängen, P., Dürr, P., Friedrichs, M., List, M., Rudloff, D., Schmidt, J.-U., Müller, M., Wagner, M.
Subject Terms: optical MEMS, spatial light modulator, DUV, microlithography
Time: 621
Relation: Conference "MOEMS and Miniaturized Systems" 2009; MOEMS and miniaturized systems VIII; https://publica.fraunhofer.de/handle/publica/361993
Authors: Schneider, F, Waibel, P, Wallrabe, U
Subject Terms: Adaptive lens, Wave front error, Shaped membrane, Silicone-membrane lenses, Planar, Optical MEMS, Nanophotonics
File Description: application/pdf
Relation: Schneider, F, Waibel, P and Wallrabe, U. 2009. Adaptive silicone-membrane lenses: planar vs. shaped membrane. IEEE Conference on Optical MEMS and Nanophotonics 2009, Clearwater Beach, USA, 17-20 August 2009, pp 39-40; http://hdl.handle.net/10204/3953
Availability: http://hdl.handle.net/10204/3953
Authors: Hongrui Jiang, Xuefeng Zeng
Resource Type: eBook.
Subjects: Optical MEMS, Liquid lenses, Microfluidics
Categories: SCIENCE / Physics / General, TECHNOLOGY & ENGINEERING / Lasers & Photonics, TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS
Authors: Abada, Sami
Contributors: Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Université Paul Sabatier - Toulouse III, Véronique Bardinal, Thierry Camps
Superior Title: https://theses.hal.science/tel-01630568 ; Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2015. Français. ⟨NNT : 2015TOU30374⟩.
Subject Terms: Optical MEMS, Micro-optics, polymers, VCSEL diodes, Photonic integration, 3D modeling, SU8, Electrothermal actuation, Thickness uniformity, MOEMS, Micro-optique, Polymères, Diodes laser VCSELs, Intégration photonique, Dépôt de films secs photosensibles, Jets d'encre, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Relation: NNT: 2015TOU30374; tel-01630568; https://theses.hal.science/tel-01630568; https://theses.hal.science/tel-01630568/document; https://theses.hal.science/tel-01630568/file/2015TOU30374b.pdf
Availability:
https://theses.hal.science/tel-01630568
https://theses.hal.science/tel-01630568/document
https://theses.hal.science/tel-01630568/file/2015TOU30374b.pdf
Authors: Abada, Sami
Contributors: Toulouse 3, Bardinal, Véronique, Camps, Thierry
Subject Terms: MOEMS, Micro-optique, Polymères, Diodes laser VCSELs, Intégration photonique, Dépôt de films secs photosensibles, Jets d'encre, Optical MEMS, Micro-optics, polymers, VCSEL diodes, Photonic integration, 3D modeling, SU8, Electrothermal actuation, Thickness uniformity
Availability: http://www.theses.fr/2015TOU30374/document
Authors: CHANG YUHUA
Contributors: ELECTRICAL & COMPUTER ENGINEERING, Chengkuo Lee, Guangya Zhou, NAVAB SINGH
Subject Terms: Mid-infrared, Si Photonics,Optical MEMS, Transfer-print, Sensor, Spectroscopy
Relation: CHANG YUHUA (2021-01-22). MID INFRARED PHOTONICS AND OPTICAL MEMS FOR SENSING APPLICATIONS. ScholarBank@NUS Repository.; https://scholarbank.nus.edu.sg/handle/10635/191423; orcid:0000-0003-0337-1934
Availability: https://scholarbank.nus.edu.sg/handle/10635/191423
Authors: Gorecki, C., Nieradko, L., Bargiel, S., Dziuban, J., Henis, D., Sylvestre, J.A., Alkowska, K., Soto-Romero, Georges, Thevenet, Jean, Yahiaoui, R.
Contributors: Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté COMUE (UBFC)-Université Bourgogne Franche-Comté COMUE (UBFC)
Superior Title: IEEE, Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. ; https://hal.science/hal-00271928 ; IEEE, Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007., Jun 2007, Lyon, France. pp 2561-2564
Subject Terms: Optical MEMS, comb-drive actuator, confocal microscopy reflow microlens, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Relation: hal-00271928; https://hal.science/hal-00271928
Availability: https://hal.science/hal-00271928
Authors: Dauderstädt, U., Bakke, T., Dürr, P., Sinning, S., Wullinger, I., Wagner, M., Lakner, H.
Subject Terms: optical MEMS, spatial light modulator, DUV, charging effects, hist, archi
Time: 621
Availability: https://publica.fraunhofer.de/handle/publica/355181
Authors: Wolter, A., Klose, T., Hsu, S., Schenk, H., Lakner, H.
Subject Terms: micro scanning mirror, laser scanning, micromirror, laser beam deflection, MEMS, MOEMS, optical MEMS, retina scanning display, laser projection
Time: 621
Relation: Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" 2006; MOEMS display, imaging, and miniaturized microsystems IV; https://publica.fraunhofer.de/handle/publica/351330
Authors: Bakke, T., Völker, B., Friedrichs, M., Rudloff, D., Schenk, H., Lakner, H.
Subject Terms: optical MEMS, spatial light modulator, micromirror, wafer bonding, maskless lithography
Time: 621
Relation: Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" 2006; MOEMS display, imaging, and miniaturized microsystems IV; https://publica.fraunhofer.de/handle/publica/351326
Authors: Dauderstädt, U., Dürr, P., Ljungblad, U., Karlin, T., Schenk, H., Lakner, H.
Subject Terms: optical MEMS, spatial light modulator, DUV, mechanical drift
Time: 621
Relation: Conference on MOEMS Display and Imaging Systems 2005; MOEMS Display and Imaging Systems III; https://publica.fraunhofer.de/handle/publica/348729
Authors: Bakke, T., Friedrichs, M., Völker, B., Reiche, M., Leonardsson, L., Schenk, H., Lakner, H.
Subject Terms: optical MEMS, wafer bonding, spatial light modulator, micromirror
Time: 621
Relation: Conference on Micromachining and Microfabrication Process Technology 2005; Micromachining and Microfabrication Process Technology X; https://publica.fraunhofer.de/handle/publica/348731
Contributors: Yıldız, Gökhan, Wolter, Alexander, Herrmann, Andreas, Schenk Harald, Lakner, Hubert, College of Engineering, Department of Electrical and Electronics Engineering
Superior Title: Proceedings of SPIE
Subject Terms: Electrical and electronic engineering, Optics, Laser beam deflection, Micro scanning mirror, Micromachining, Micromirror array, Microsystem, MOEMS, Optical MEMS, Out-of-plane comb drive
File Description: pdf
Relation: Publisher version; Koç University Institutional Repository; Wolter, A., et al. "Designing MEMS for Manufacturing." Proceedings of SPIE - the International Society for Optical Engineering, vol. 5604, no. Optomechatronic Micro/nano Components, Devices, and Systems, 01 Jan. 2004, pp. 74-85.; http://dx.doi.org/10.1117/12.580902; IR01004; WoS; Scopus; NA; http://libdigitalcollections.ku.edu.tr/cdm/ref/collection/IR/id/1017
Authors: Wolter, A., Schenk, H., Gaumont, E., Lakner, H.
Subject Terms: Barcode-Scanning, micro scanning mirror, optical MEMS, MOEMS, laser beam deflection, bulk-micromachining, out-of-plane comb drive
Time: 621
Relation: Conference on MOEMS Display and Imaging Systems 2004; MOEMS display and imaging systems II; https://publica.fraunhofer.de/handle/publica/344999