Authors: Dongwoo Lee, Jihye Kim, Eunjoo Song, Ji-Young Jeong, Eun-chae Jeon, Pilhan Kim, Wonhee Lee
Superior Title: Micromachines; Volume 11; Issue 6; Pages: 582
Subject Terms: micromirror, microfabrication, 3D imaging, Optical MEMS
File Description: application/pdf
Relation: B2: Biofabrication and Tissue Engineering; https://dx.doi.org/10.3390/mi11060582
Availability: https://doi.org/10.3390/mi11060582
Authors: T. M. Fahim AMIN, M. Q. HUDA, J. TULIP, Wolfgang JÄGER
Superior Title: Sensors & Transducers, Vol 183, Iss 12, Pp 65-71 (2014)
Subject Terms: MEMS, Optical MEMS, External cavity laser, Tunable laser, Micromirror, Virtual pivot., Technology (General), T1-995
File Description: electronic resource
Relation: http://www.sensorsportal.com/HTML/DIGEST/december_2014/Vol_183/P_2544.pdf; https://doaj.org/toc/2306-8515; https://doaj.org/toc/1726-5479
Authors: Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C.
Contributors: ELECTRICAL & COMPUTER ENGINEERING
Superior Title: Scopus
Subject Terms: Micro-electro-mechanical systems (MEMS), Micromirror, Optical MEMS, Piezoelectric actuator, PZT
Relation: Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C. (2010-08). Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors. Sensors and Actuators, A: Physical 162 (2) : 336-347. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2010.04.021; http://scholarbank.nus.edu.sg/handle/10635/83543; 000282923900031
Availability:
https://doi.org/10.1016/j.sna.2010.04.021
http://scholarbank.nus.edu.sg/handle/10635/83543
Authors: Wolter, A., Klose, T., Hsu, S., Schenk, H., Lakner, H.
Subject Terms: micro scanning mirror, laser scanning, micromirror, laser beam deflection, MEMS, MOEMS, optical MEMS, retina scanning display, laser projection
Time: 621
Relation: Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" 2006; MOEMS display, imaging, and miniaturized microsystems IV; https://publica.fraunhofer.de/handle/publica/351330
Authors: Bakke, T., Völker, B., Friedrichs, M., Rudloff, D., Schenk, H., Lakner, H.
Subject Terms: optical MEMS, spatial light modulator, micromirror, wafer bonding, maskless lithography
Time: 621
Relation: Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" 2006; MOEMS display, imaging, and miniaturized microsystems IV; https://publica.fraunhofer.de/handle/publica/351326
Authors: Bakke, T., Friedrichs, M., Völker, B., Reiche, M., Leonardsson, L., Schenk, H., Lakner, H.
Subject Terms: optical MEMS, wafer bonding, spatial light modulator, micromirror
Time: 621
Relation: Conference on Micromachining and Microfabrication Process Technology 2005; Micromachining and Microfabrication Process Technology X; https://publica.fraunhofer.de/handle/publica/348731
Authors: Wolter, A., Gaumont, E., Korth, H., Schenk, H., Lakner, H.
Subject Terms: micro scanning mirror, beam deflection, bulk-micromachining, MEMS, optical MEMS, MOEMS, micromirror, comb drive, wafer-level test
Time: 621
Relation: Conference "MEMS, MOEMS, and Micromachining" 2004; MEMS, MOEMS, and micromachining; https://publica.fraunhofer.de/handle/publica/345503
Authors: Koh, K.H., Kobayashi, T., Lee, C.
Contributors: ELECTRICAL & COMPUTER ENGINEERING
Superior Title: Scopus
Subject Terms: Microelectromechanical systems (MEMS), Micromirror, Optical MEMS, Piezoelectric actuator, PZT
Relation: Koh, K.H., Kobayashi, T., Lee, C. (2012-09). Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications. Sensors and Actuators, A: Physical 184 : 149-159. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2012.06.018; http://scholarbank.nus.edu.sg/handle/10635/82577; 000308452200022
Availability:
https://doi.org/10.1016/j.sna.2012.06.018
http://scholarbank.nus.edu.sg/handle/10635/82577
Authors: Wolter, A., Lakner, H., Doleschal, W., Zimmer, G.
Subject Terms: aktive Matrix, Lichtventil, Mikrospiegel, Mikrodisplay, verformbarer Ölfilm, Lichtmodulator, optical MEMS, spatial light modulator, deformable oil film, microdisplay, micromirror, light valve, active matrix, silicon backplane, microelectronic, Mikroelektronik, CMOS
Time: 621
Relation: International Mechanical Engineering Congress and Exposition 2000; Micro-Electro-Mechanical Systems (MEMS) 2000; https://publica.fraunhofer.de/handle/publica/335376
Availability: https://publica.fraunhofer.de/handle/publica/335376
Authors: Zhang, X.M., Chau, F.S., Quan, C., Lam, Y.L., Liu, A.Q.
Contributors: MECHANICAL ENGINEERING
Superior Title: Scopus
Subject Terms: Micromirror, MOEMS, Optical MEMS, Snap-down
Relation: Zhang, X.M., Chau, F.S., Quan, C., Lam, Y.L., Liu, A.Q. (2001-05-01). A study of the static characteristics of a torsional micromirror. Sensors and Actuators, A: Physical 90 (1-2) : 73-81. ScholarBank@NUS Repository. https://doi.org/10.1016/S0924-4247(01)00453-8; http://scholarbank.nus.edu.sg/handle/10635/59286; 000168013000008
Availability:
https://doi.org/10.1016/S0924-4247(01)00453-8
http://scholarbank.nus.edu.sg/handle/10635/59286
Authors: Tay, C.J., Quan, C., Wang, S.H., Shang, H.M.
Contributors: MECHANICAL ENGINEERING
Superior Title: Scopus
Subject Terms: Angular rotation, Laser interferometry, Micromirror, Optical MEMS
Relation: Tay, C.J., Quan, C., Wang, S.H., Shang, H.M. (2001-08). Determination of a micromirror angular rotation using laser interferometric method. Optics Communications 195 (1-4) : 71-77. ScholarBank@NUS Repository. https://doi.org/10.1016/S0030-4018(01)01199-3; http://scholarbank.nus.edu.sg/handle/10635/59878; 000170134300009
Availability:
https://doi.org/10.1016/S0030-4018(01)01199-3
http://scholarbank.nus.edu.sg/handle/10635/59878
Authors: Sarkar, Niladri
Subject Terms: Electrical & Computer Engineering, MEMS, micro-actuator, self-assembly, RF MEMS, MOEMS, optical MEMS, micro-grating, micromirror, Optical Phased Array
File Description: application/pdf; 50470440 bytes
Relation: http://hdl.handle.net/10012/902
Availability: http://hdl.handle.net/10012/902
Authors: Sarkar, Niladri
Subject Terms: Electrical & Computer Engineering, MEMS, micro-actuator, self-assembly, RF MEMS, MOEMS, optical MEMS, micro-grating, micromirror, Optical Phased Array
File Description: application/pdf; 50470440 bytes
Relation: http://hdl.handle.net/10012/902
Availability: http://hdl.handle.net/10012/902