Authors: Solgaard, Olav1, Godil, Asif A.2, Howe, Roger T.1, Lee, Luke P.3, Peter, Yves-Alain4, Zappe, Hans5
Superior Title: Journal of Microelectromechanical Systems. Jun2014, Vol. 23 Issue 3, p517-538. 22p.
Subject Terms: *OPTICAL MEMS, *MICROELECTROMECHANICAL systems, *ELECTROMAGNETISM, *ELECTROMAGNETIC devices, *ELECTROMAGNETIC fields
Authors: Qiao, Lingling1,2, He, Fei1, Wang, Chen1, Liao, Yang1, Cheng, Ya1 ycheng-45277@hotmail.com, Sugioka, Koji3, Midorikawa, Katsumi3, Pan, Change4, Wei, Xunbin4
Superior Title: Optics Communications. Jun2011, Vol. 284 Issue 12, p2988-2991. 4p.
Subject Terms: *OPTICAL MEMS, *LENSES, *MICROMACHINING, *FEMTOSECOND lasers, *TISSUES, *FLUORESCENCE microscopy, *ENDOSCOPY
Authors: Cole, Garrett D.1 garrett.cole@univie.ac.at, Yu Bai2, Aspelmeyer, Markus1, Fitzgerald, Eugene A.2
Superior Title: Applied Physics Letters. 6/28/2010, Vol. 96 Issue 26, p261102. 3p. 3 Graphs.
Subject Terms: *HETEROSTRUCTURES, *OPTICAL MEMS, *GERMANIUM crystals, *CRYSTAL etching, *MICROMACHINING, *OPTOMECHANICS
Contributors: Yıldız, Gökhan, Wolter, Alexander, Herrmann, Andreas, Schenk Harald, Lakner, Hubert, College of Engineering, Department of Electrical and Electronics Engineering
Superior Title: Proceedings of SPIE
Subject Terms: Electrical and electronic engineering, Optics, Laser beam deflection, Micro scanning mirror, Micromachining, Micromirror array, Microsystem, MOEMS, Optical MEMS, Out-of-plane comb drive
File Description: pdf
Relation: Publisher version; Koç University Institutional Repository; Wolter, A., et al. "Designing MEMS for Manufacturing." Proceedings of SPIE - the International Society for Optical Engineering, vol. 5604, no. Optomechatronic Micro/nano Components, Devices, and Systems, 01 Jan. 2004, pp. 74-85.; http://dx.doi.org/10.1117/12.580902; IR01004; WoS; Scopus; NA; http://libdigitalcollections.ku.edu.tr/cdm/ref/collection/IR/id/1017
Authors: Wolter, A., Herrmann, A., Yildiz, G., Schenk, H., Lakner, H.
Subject Terms: micro scanning mirror, micromirror array, optical MEMS, MOEMS, laser beam deflection, micromachining, out-of-plane comb drive, microsystem
Time: 621
Relation: Conference on Optomechatronic Micro/Nano Components, Devices, and Systems 2004; Optomechatronic Micro/Nano Components, Devices, and Systems; https://publica.fraunhofer.de/handle/publica/345598
Authors: Walker, Steven J., Nagel, David J.
Contributors: NAVAL RESEARCH LAB WASHINGTON DC
Superior Title: DTIC AND NTIS
Subject Terms: Electrooptical and Optoelectronic Devices, Mfg & Industrial Eng & Control of Product Sys, Optics, OPTICS, MICROELECTROMECHANICAL SYSTEMS, MINIATURIZATION, SYNERGISM, MICROMACHINING, OPTICAL MEMS, PE62234N
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