Authors: Solgaard, Olav¹, Godil, Asif A.², Howe, Roger T.¹, Lee, Luke P.³, Peter, Yves-Alain⁴, Zappe, Hans⁵

Superior Title: Journal of Microelectromechanical Systems. Jun2014, Vol. 23 Issue 3, p517-538. 22p.

Subject Terms: *OPTICAL MEMS, *MICROELECTROMECHANICAL systems, *ELECTROMAGNETISM, *ELECTROMAGNETIC devices, *ELECTROMAGNETIC fields

Authors: Eakkachai Pengwang, Kanty Rabenorosoa, Micky Rakotondrabe, Nicolas Andreff

Superior Title: Micromachines; Volume 7; Issue 2; Pages: 24

Subject Terms: micro robots, optical MEMS, MEMS scanning micromirror, biomedical micro-actuator, multi-degree-of-freedom stage, bioMEMS, MOEMS, micro-optics

File Description: application/pdf

Relation: https://dx.doi.org/10.3390/mi7020024

Availability: https://doi.org/10.3390/mi7020024

Authors: Kartikeya Mishra, Dirk Van den Ende, Frieder Mugele

Superior Title: Micromachines; Volume 7; Issue 6; Pages: 102

Subject Terms: optofluidics, liquid lenses, photonics, optical MEMS, micro-optics, adaptive optics, optical aberrations, spherical aberration, lens characterization, wavefront sensing

File Description: application/pdf

Relation: https://dx.doi.org/10.3390/mi7060102

Availability: https://doi.org/10.3390/mi7060102

Authors: Abada, Sami

Contributors: Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Université Paul Sabatier - Toulouse III, Véronique Bardinal, Thierry Camps

Superior Title: https://theses.hal.science/tel-01630568 ; Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2015. Français. ⟨NNT : 2015TOU30374⟩.

Subject Terms: Optical MEMS, Micro-optics, polymers, VCSEL diodes, Photonic integration, 3D modeling, SU8, Electrothermal actuation, Thickness uniformity, MOEMS, Micro-optique, Polymères, Diodes laser VCSELs, Intégration photonique, Dépôt de films secs photosensibles, Jets d'encre, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics

Relation: NNT: 2015TOU30374; tel-01630568; https://theses.hal.science/tel-01630568; https://theses.hal.science/tel-01630568/document; https://theses.hal.science/tel-01630568/file/2015TOU30374b.pdf

Availability: https://theses.hal.science/tel-01630568
https://theses.hal.science/tel-01630568/document
https://theses.hal.science/tel-01630568/file/2015TOU30374b.pdf

Authors: Abada, Sami

Contributors: Toulouse 3, Bardinal, Véronique, Camps, Thierry

Subject Terms: MOEMS, Micro-optique, Polymères, Diodes laser VCSELs, Intégration photonique, Dépôt de films secs photosensibles, Jets d'encre, Optical MEMS, Micro-optics, polymers, VCSEL diodes, Photonic integration, 3D modeling, SU8, Electrothermal actuation, Thickness uniformity

Relation: http://www.theses.fr/2015TOU30374/document

Availability: http://www.theses.fr/2015TOU30374/document

Authors: Reig, Benjamin

Contributors: Équipe Photonique (LAAS-PHOTO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université Paul Sabatier - Toulouse III, V.BARDINAL

Superior Title: https://theses.hal.science/tel-00709574 ; Electronique. Université Paul Sabatier - Toulouse III, 2011. Français. ⟨NNT : ⟩.

Subject Terms: Optical MEMS, micro-optics, Polymers, VCSEL diodes, Photonic integration, MOEMs, Micro-optique, Polymères, Diodes laser VCSELs, Intégration photonique, [SPI.TRON]Engineering Sciences [physics]/Electronics

Relation: tel-00709574; https://theses.hal.science/tel-00709574; https://theses.hal.science/tel-00709574/document; https://theses.hal.science/tel-00709574/file/these-benjamin-reig.pdf

Availability: https://theses.hal.science/tel-00709574
https://theses.hal.science/tel-00709574/document
https://theses.hal.science/tel-00709574/file/these-benjamin-reig.pdf

Authors: Ma X.H., 郭更生, Ma, Xiaohua, Kuo, Geng-Sheng

Subject Terms: acousto-optical switches, electro-optical switches, micro-optics, micromechanical devices, photonic switching systems, thermo-optical devices, acousto-optic switching, broadband networks, electro-optic switching, mobile broadband all-optical IP networks, nanotechnology, optical MEMS, optical microelectromechanical systems, optical switching technologies, thermal optical switching

File Description: application/

Relation: IEEE Communications Magazine, 41(11), 16-23

Availability: https://doi.org/10.1109/MCOM.2003.1244924
http://nccur.lib.nccu.edu.tw//handle/140.119/10230
http://nccur.lib.nccu.edu.tw/bitstream/140.119/10230/1/index.html