Authors: Sandner, Thiloaff1_w2aab3b8b3b1b7b1aab1b4b4Aa, Grasshoff, Thomasaff2_w2aab3b8b3b1b7b1aab1b4b5Aa, Schrödter, Richardaff2_w2aab3b8b3b1b7b1aab1b4b5Aa, Schwarzenberg, Markusaff2_w2aab3b8b3b1b7b1aab1b4b5Aa
Superior Title: tm – Technisches Messen. 81(2):51-61
Authors: Liangchen Ye, Gaofei Zhang, Zheng You
Superior Title: Micromachines; Apr2017, Vol. 8 Issue 4, p120, 14p
Subject Terms: TITANIUM alloys, OPTICAL MEMS, LIDAR, LASER beams, DRONE aircraft
Authors: Wolter, A., Klose, T., Hsu, S., Schenk, H., Lakner, H.
Subject Terms: micro scanning mirror, laser scanning, micromirror, laser beam deflection, MEMS, MOEMS, optical MEMS, retina scanning display, laser projection
Time: 621
Relation: Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" 2006; MOEMS display, imaging, and miniaturized microsystems IV; https://publica.fraunhofer.de/handle/publica/351330
Contributors: Yıldız, Gökhan, Wolter, Alexander, Herrmann, Andreas, Schenk Harald, Lakner, Hubert, College of Engineering, Department of Electrical and Electronics Engineering
Superior Title: Proceedings of SPIE
Subject Terms: Electrical and electronic engineering, Optics, Laser beam deflection, Micro scanning mirror, Micromachining, Micromirror array, Microsystem, MOEMS, Optical MEMS, Out-of-plane comb drive
File Description: pdf
Relation: Publisher version; Koç University Institutional Repository; Wolter, A., et al. "Designing MEMS for Manufacturing." Proceedings of SPIE - the International Society for Optical Engineering, vol. 5604, no. Optomechatronic Micro/nano Components, Devices, and Systems, 01 Jan. 2004, pp. 74-85.; http://dx.doi.org/10.1117/12.580902; IR01004; WoS; Scopus; NA; http://libdigitalcollections.ku.edu.tr/cdm/ref/collection/IR/id/1017
Authors: Wolter, A., Schenk, H., Gaumont, E., Lakner, H.
Subject Terms: Barcode-Scanning, micro scanning mirror, optical MEMS, MOEMS, laser beam deflection, bulk-micromachining, out-of-plane comb drive
Time: 621
Relation: Conference on MOEMS Display and Imaging Systems 2004; MOEMS display and imaging systems II; https://publica.fraunhofer.de/handle/publica/344999
Authors: Sandner, T., Klose, T., Wolter, A., Schenk, H., Lakner, H.
Subject Terms: damping, micro scanning mirror, optical MEMS, MOEMS, out-of-plan comb drive
Time: 621
Relation: Conference "MEMS, MOEMS, and Micromachining" 2004; MEMS, MOEMS, and micromachining; https://publica.fraunhofer.de/handle/publica/345501
Authors: Wolter, A., Gaumont, E., Korth, H., Schenk, H., Lakner, H.
Subject Terms: micro scanning mirror, beam deflection, bulk-micromachining, MEMS, optical MEMS, MOEMS, micromirror, comb drive, wafer-level test
Time: 621
Relation: Conference "MEMS, MOEMS, and Micromachining" 2004; MEMS, MOEMS, and micromachining; https://publica.fraunhofer.de/handle/publica/345503
Authors: Wolter, A., Herrmann, A., Yildiz, G., Schenk, H., Lakner, H.
Subject Terms: micro scanning mirror, micromirror array, optical MEMS, MOEMS, laser beam deflection, micromachining, out-of-plane comb drive, microsystem
Time: 621
Relation: Conference on Optomechatronic Micro/Nano Components, Devices, and Systems 2004; Optomechatronic Micro/Nano Components, Devices, and Systems; https://publica.fraunhofer.de/handle/publica/345598