Authors: Qifeng Qiao, Haoyang Sun, Xinmiao Liu, Bowei Dong, Ji Xia, Chengkuo Lee, Guangya Zhou
Superior Title: Micromachines, Vol 12, Iss 1311, p 1311 (2021)
Subject Terms: silicon photonics, MIR photonics, optical MEMS, photonic integrated circuit, reconfigurable photonics, Mechanical engineering and machinery, TJ1-1570
Relation: https://www.mdpi.com/2072-666X/12/11/1311; https://doaj.org/toc/2072-666X; https://doaj.org/article/264bdf79b04b4cf7b05bf32e0b13eae6
Superior Title: Micromachines, Vol 11, Iss 1068, p 1068 (2020)
Subject Terms: optical MEMS, microlens array, multiple focal lengths, three-dimensional imaging, Mechanical engineering and machinery, TJ1-1570
Relation: https://www.mdpi.com/2072-666X/11/12/1068; https://doaj.org/toc/2072-666X; https://doaj.org/article/bcc1a8c3e39349dda059cc5715422c6c
Authors: Dongwoo Lee, Jihye Kim, Eunjoo Song, Ji-Young Jeong, Eun-chae Jeon, Pilhan Kim, Wonhee Lee
Superior Title: Micromachines, Vol 11, Iss 582, p 582 (2020)
Subject Terms: micromirror, microfabrication, 3D imaging, Optical MEMS, Mechanical engineering and machinery, TJ1-1570
Relation: https://www.mdpi.com/2072-666X/11/6/582; https://doaj.org/toc/2072-666X; https://doaj.org/article/aea93464a7464b7cb3c4931cd9e4be90
Superior Title: Micromachines, Vol 7, Iss 10, p 188 (2016)
Subject Terms: microelectromechanical system (MEMS) actuator, deep reactive ion etching (DRIE), optical MEMS, high speed tunable filter, optical fringes, Mechanical engineering and machinery, TJ1-1570
Relation: http://www.mdpi.com/2072-666X/7/10/188; https://doaj.org/toc/2072-666X; https://doaj.org/article/3c38569efd3e43bfab9e1ad5bef0ff30
Superior Title: Micromachines, Vol 7, Iss 2, p 24 (2016)
Subject Terms: micro robots, optical MEMS, MEMS scanning micromirror, biomedical micro-actuator, multi-degree-of-freedom stage, bioMEMS, MOEMS, micro-optics, Mechanical engineering and machinery, TJ1-1570
Relation: http://www.mdpi.com/2072-666X/7/2/24; https://doaj.org/toc/2072-666X; https://doaj.org/article/32f6c2579a2841d1a3107969a80af38c
Authors: Kartikeya Mishra, Dirk van den Ende, Frieder Mugele
Superior Title: Micromachines, Vol 7, Iss 6, p 102 (2016)
Subject Terms: optofluidics, liquid lenses, photonics, optical MEMS, micro-optics, adaptive optics, optical aberrations, spherical aberration, lens characterization, wavefront sensing, Mechanical engineering and machinery, TJ1-1570
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