Contributors: Yıldız, Gökhan, Wolter, Alexander, Herrmann, Andreas, Schenk Harald, Lakner, Hubert, College of Engineering, Department of Electrical and Electronics Engineering
Superior Title: Proceedings of SPIE
Subject Terms: Electrical and electronic engineering, Optics, Laser beam deflection, Micro scanning mirror, Micromachining, Micromirror array, Microsystem, MOEMS, Optical MEMS, Out-of-plane comb drive
File Description: pdf
Relation: Publisher version; Koç University Institutional Repository; Wolter, A., et al. "Designing MEMS for Manufacturing." Proceedings of SPIE - the International Society for Optical Engineering, vol. 5604, no. Optomechatronic Micro/nano Components, Devices, and Systems, 01 Jan. 2004, pp. 74-85.; http://dx.doi.org/10.1117/12.580902; IR01004; WoS; Scopus; NA; http://libdigitalcollections.ku.edu.tr/cdm/ref/collection/IR/id/1017
Superior Title: Proceedings of SPIE
Index Terms: Electrical and electronic engineering; Optics, Laser beam deflection; Micro scanning mirror; Micromachining; Micromirror array; Microsystem; MOEMS; Optical MEMS; Out-of-plane comb drive, Conference proceeding, text/academic publication
URL:
Publisher version
Koç University Institutional Repository
