Superior Title: IEEE Transactions on Semiconductor Manufacturing ; volume 26, issue 1, page 82-91 ; ISSN 0894-6507 1558-2345
Subject Terms: Electrical and Electronic Engineering, Industrial and Manufacturing Engineering, Condensed Matter Physics, Electronic, Optical and Magnetic Materials
Authors: Scheibelhofer, W.K.
Superior Title: IEEE Spectrum ; volume 38, issue 4, page 83-83 ; ISSN 0018-9235 1939-9340
Subject Terms: Electrical and Electronic Engineering