Authors: Sandner, Thilo, Grasshoff, Thomas, Schrödter, Richard, Schwarzenberg, Markus
Superior Title: Technisches Messen; Feb2014, Vol. 81 Issue 2, p51-61, 11p
Subject Terms: QUASISTATIC processes, ACTUATORS, REAL-time control, MEDICAL equipment, OPTICAL MEMS, TIME-of-flight measurements