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Academic Journal
Authors: Serra, E.1,2,3 eserra@fbk.eu, Bonaldi, M.3,4, Borrielli, A.3,4, Marin, F.5,6, Marconi, L.5, Marino, F.6,7, Pandraud, G.2, Pontin, A.5,6, Prodi, G.A.8, Sarro, P.M.2
Superior Title: Microelectronic Engineering. Sep2015, Vol. 145, p138-142. 5p.
Subject Terms: *FABRICATION (Manufacturing), *OPTICAL MEMS, *RESONATORS, *OPTOMECHANICS, *LASER beams