Authors: Solgaard, Olav1, Godil, Asif A.2, Howe, Roger T.1, Lee, Luke P.3, Peter, Yves-Alain4, Zappe, Hans5
Superior Title: Journal of Microelectromechanical Systems. Jun2014, Vol. 23 Issue 3, p517-538. 22p.
Subject Terms: *OPTICAL MEMS, *MICROELECTROMECHANICAL systems, *ELECTROMAGNETISM, *ELECTROMAGNETIC devices, *ELECTROMAGNETIC fields
Authors: Serra, Enrico, Morana, Bruno, Borrielli, Antonio, Marin, Francesco, Pandraud, Gregory, Pontin, Antonio, Prodi, Giovanni Andrea, Sarro, Pasqualina M., Bonaldi, Michele
Superior Title: Journal of Microelectromechanical Systems; Dec2018, Vol. 26 Issue 12, p1193-1203, 11p
Subject Terms: OPTICAL parametric oscillators, SILICON nitride, OPTICAL MEMS, QUANTUM mechanics, OPTOMECHANICS
Authors: Choi, Wook, Rubtsov, Vladimir, Kim, Chang-Jin “CJ”
Superior Title: Journal of Microelectromechanical Systems; Aug2012, Vol. 21 Issue 4, p926-933, 8p
Subject Terms: OPTICAL images, REFRACTION (Optics), ENDOSCOPES, ACTUATORS, OPTICAL MEMS, SILICON, STEREOSCOPIC views
Authors: Tripathi, Dhirendra Kumar, Silva, K. K. M. B. Dilusha, Bumgarner, John W., Rafiei, Ramin, Martyniuk, Mariusz, Dell, John M., Faraone, Lorenzo
Superior Title: Journal of Microelectromechanical Systems; Oct2015, Vol. 24 Issue 5, p1245-1247, 3p
Subject Terms: OPTICAL reflectors, SILICON, MICROELECTROMECHANICAL systems, OPTICAL MEMS, WAVELENGTHS