Authors: Wu, Ming C.^Aff4, Tsai, Jui-che^Aff5, Piyawattanametha, Wibool^Aff6, Patterson, Pamela R.^Aff7

Contributors: Zhou, Zhaoying, editor^Aff1, Wang, Zhonglin, editor^Aff3, Lin, Liwei, editor^Aff2

Superior Title: Microsystems and Nanotechnology. :353-414

Authors: Piyawattanametha, W.^Aff2, Patterson, P. R.^Aff2, Su, G. D. J.^Aff2, Toshiyoshi, H.^Aff2, Wu, M. C.^Aff2

Contributors: Obermeier, Ernst, editor^Aff1

Superior Title: Transducers ’01 Eurosensors XV : The 11th International Conference on Solid-State Sensors and Actuators June 10 – 14, 2001 Munich, Germany. :590-593