1
Dissertation/ Thesis
Authors: 지창현
Contributors: 김용권, 전기.컴퓨터공학부
Subject Terms: 마이크로 미러, MOXC, 전자력 구동, optical MEMS, 표면 미세가공기술, mirromirror, 몸통 미세가공기술, electromagnetic actuation, surface micromachining, bulk micromachining
File Description: xi, 147 장
Relation: http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000066394; http://hdl.handle.net/10371/30776