Authors: Zimmer, F., Niklaus, F., Lapisa, M., Ludewig, T., Bring, M., Friedrichs, M., Bakke, T., Schenk, H., Wijngaart, W. van der
Subject Terms: optical MEMS, micro mirror, spatial light modulator
Time: 621
Relation: Conference "MOEMS and Miniaturized Systems" 2009; MOEMS and miniaturized systems VIII; https://publica.fraunhofer.de/handle/publica/361996
Authors: Dauderstädt, U., Askebjer, P., Björnängen, P., Dürr, P., Friedrichs, M., List, M., Rudloff, D., Schmidt, J.-U., Müller, M., Wagner, M.
Subject Terms: optical MEMS, spatial light modulator, DUV, microlithography
Time: 621
Relation: Conference "MOEMS and Miniaturized Systems" 2009; MOEMS and miniaturized systems VIII; https://publica.fraunhofer.de/handle/publica/361993
Authors: Dauderstädt, U., Bakke, T., Dürr, P., Sinning, S., Wullinger, I., Wagner, M., Lakner, H.
Subject Terms: optical MEMS, spatial light modulator, DUV, charging effects
Time: 621
Relation: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS Conference 2007; Photonics West 2007; MOEMS-MEMS Micro-Nano Fabrication Symposium 2007; Reliability, packaging, testing, and characterization of MEMS/MOEMS VI; https://publica.fraunhofer.de/handle/publica/355181
Authors: Wolter, A., Klose, T., Hsu, S., Schenk, H., Lakner, H.
Subject Terms: micro scanning mirror, laser scanning, micromirror, laser beam deflection, MEMS, MOEMS, optical MEMS, retina scanning display, laser projection
Time: 621
Relation: Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" 2006; MOEMS display, imaging, and miniaturized microsystems IV; https://publica.fraunhofer.de/handle/publica/351330
Authors: Bakke, T., Völker, B., Friedrichs, M., Rudloff, D., Schenk, H., Lakner, H.
Subject Terms: optical MEMS, spatial light modulator, micromirror, wafer bonding, maskless lithography
Time: 621
Relation: Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" 2006; MOEMS display, imaging, and miniaturized microsystems IV; https://publica.fraunhofer.de/handle/publica/351326
Authors: Dauderstädt, U., Dürr, P., Ljungblad, U., Karlin, T., Schenk, H., Lakner, H.
Subject Terms: optical MEMS, spatial light modulator, DUV, mechanical drift
Time: 621
Relation: Conference on MOEMS Display and Imaging Systems 2005; MOEMS Display and Imaging Systems III; https://publica.fraunhofer.de/handle/publica/348729
Authors: Bakke, T., Friedrichs, M., Völker, B., Reiche, M., Leonardsson, L., Schenk, H., Lakner, H.
Subject Terms: optical MEMS, wafer bonding, spatial light modulator, micromirror
Time: 621
Relation: Conference on Micromachining and Microfabrication Process Technology 2005; Micromachining and Microfabrication Process Technology X; https://publica.fraunhofer.de/handle/publica/348731
Authors: Wolter, A., Schenk, H., Gaumont, E., Lakner, H.
Subject Terms: Barcode-Scanning, micro scanning mirror, optical MEMS, MOEMS, laser beam deflection, bulk-micromachining, out-of-plane comb drive
Time: 621
Relation: Conference on MOEMS Display and Imaging Systems 2004; MOEMS display and imaging systems II; https://publica.fraunhofer.de/handle/publica/344999
Authors: Sandner, T., Klose, T., Wolter, A., Schenk, H., Lakner, H.
Subject Terms: damping, micro scanning mirror, optical MEMS, MOEMS, out-of-plan comb drive
Time: 621
Relation: Conference "MEMS, MOEMS, and Micromachining" 2004; MEMS, MOEMS, and micromachining; https://publica.fraunhofer.de/handle/publica/345501
Authors: Schenk, H., Wolter, A., Dauderstädt, U., Gehner, A., Grüger, H., Drabe, C., Lakner, H.
Subject Terms: MEMS, photonic microsystem, optical MEMS, micro mirror, SLM, micro scanner, mirror array
Time: 621
Relation: Conference on MOEMS Display and Imaging Systems 2004; MOEMS display and imaging systems II; https://publica.fraunhofer.de/handle/publica/345179
Authors: Wolter, A., Gaumont, E., Korth, H., Schenk, H., Lakner, H.
Subject Terms: micro scanning mirror, beam deflection, bulk-micromachining, MEMS, optical MEMS, MOEMS, micromirror, comb drive, wafer-level test
Time: 621
Relation: Conference "MEMS, MOEMS, and Micromachining" 2004; MEMS, MOEMS, and micromachining; https://publica.fraunhofer.de/handle/publica/345503
Authors: Wolter, A., Herrmann, A., Yildiz, G., Schenk, H., Lakner, H.
Subject Terms: micro scanning mirror, micromirror array, optical MEMS, MOEMS, laser beam deflection, micromachining, out-of-plane comb drive, microsystem
Time: 621
Relation: Conference on Optomechatronic Micro/Nano Components, Devices, and Systems 2004; Optomechatronic Micro/Nano Components, Devices, and Systems; https://publica.fraunhofer.de/handle/publica/345598
Authors: Dauderstädt, U., Dürr, P., Karlin, T., Schenk, H., Lakner, H.
Subject Terms: optical MEMS, spatial light modulator, DUV
Time: 621
Relation: Conference on MOEMS Display and Imaging Systems 2004; MOEMS display and imaging systems II; https://publica.fraunhofer.de/handle/publica/345165
Authors: Dauderstädt, U., Dürr, P., Krellmann, M., Karlin, T., Berzinsh, U., Leonardsson, L., Wendrock, H.
Subject Terms: optical MEMS, spatial light modulator, DUV
Time: 621
Relation: Conference on MOEMS and Miniaturized Systems 2003; MOEMS and miniaturized systems III; https://publica.fraunhofer.de/handle/publica/342748
Authors: Dürr, P., Dauderstädt, U., Kunze, D., Auvert, M., Lakner, H.
Subject Terms: optical MEMS, spatial light modulator, DUV, lifetime test
Time: 621
Relation: International Symposium on the Physical & Failure Analysis of Integrated Circuits 2002; International Symposium on the Physical & Failure Analysis of Integrated Circuits 2002. Proceedings; https://publica.fraunhofer.de/handle/publica/340086
Availability: https://publica.fraunhofer.de/handle/publica/340086
Authors: Wolter, A., Lakner, H., Doleschal, W., Zimmer, G.
Subject Terms: aktive Matrix, Lichtventil, Mikrospiegel, Mikrodisplay, verformbarer Ölfilm, Lichtmodulator, optical MEMS, spatial light modulator, deformable oil film, microdisplay, micromirror, light valve, active matrix, silicon backplane, microelectronic, Mikroelektronik, CMOS
Time: 621
Relation: International Mechanical Engineering Congress and Exposition 2000; Micro-Electro-Mechanical Systems (MEMS) 2000; https://publica.fraunhofer.de/handle/publica/335376
Availability: https://publica.fraunhofer.de/handle/publica/335376
Authors: Dannberg, P., Bierbaum, R., Erdmann, L., Krehl, A., Bräuer, A.
Subject Terms: optical MEMS, polymer micro-optics, UV replication, wafer scale
Time: 620
Relation: Conference on Optical Fabrication and Testing 1999; Optical Fabrication and Testing; https://publica.fraunhofer.de/handle/publica/332715
Availability: https://publica.fraunhofer.de/handle/publica/332715
Authors: Wolter, A.
Subject Terms: Flächenlichtmodulator, SLM, deformable oilfilm, moving liquid mirror, active matrix, light valve, micromirror array, eidophor, MEMS, MOEMS, optical MEMS, deformierbarer Ölfilm, Aktiv-Matrix-Ansteuerung, Lichtventilmatrix, Mikrospiegelmatrix, Mikromechanik, Mikrosystem
Time: 621
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