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Dissertation/ Thesis
Authors: 張文中, Wen-Chung Chang, 邱一, Yi Chiu
Contributors: 電控工程研究所
Subject Terms: 微光機電系統, 近場光學量測, 掃描刀緣法, 光偵測器, 微光電系統晶片, optical MEMS, near field optical measurement, scanning knife edge method, optical detector, photonic system on chip (PSOC)