Authors: Kim, DH Kim, Dae-Hyun, Kim, MW Kim, Min-Wu, Jeon, JW Jeon, Jin-Wan, Lim, KS Lim, Koeng-Su, Yoon, JB Yoon, Jun-Bo
Subject Terms: MONOCRYSTALLINE SILICON MICROMIRRORS, OPTICAL MEMS, COMMUNICATION, ACTUATORS, DISPLAY, MIRRORS, DESIGN, LIGHT, CMOS
Availability: https://doi.org/10.1109/JMEMS.2010.2067200http://hdl.handle.net/10203/99649